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Sulfur Hexafluoride alarm for High Speed Rail

Sulfur Hexafluoride alarm for High Speed Rail

Sulfur hexafluoride is used for plasma etching prior to chemical vapor deposition (CVD). Its uses include oxide etching, nitride etching, and wafer cleaning. Colorless and odorless gas. Asphyxiant in high concentrations. Gas density is heavier than air.

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